From Atomic Layers to Zillions of MicroLEDs - SURFACE PROCESSING Workshop at COHERENT in Goettingen
On June 6, Coherent Goettingen was host to the annual PhotonicNet Symposium “Surface Processing“, centered around laser solutions for processing and growth of thin films. Since fifteen years, researchers and industrial laser users gather in the context of this event, in order to discuss latest surface technology trends.
Coherent in Goettingen took a close look at the chances and challenges for lasers as to the much talked-about future field of Micro-LEDs. Also from the area of LEDs came the presentation of Dr. Michael Kunzer from Fraunhofer IAF in Freiburg co-authored by OSRAM Opto Semiconductors in Regensburg, which elucidated selected laser based processes for repair and efficiency gains in GaN-LEDs.
On excimer laser processing approaches in semi-wafer processing considering the background of constantly increasing functional density of microelectronic devices, reported Dr. Thomas Rapps from SÜSS MicroTec in Sternenfels. Shrinking µ-Vias and redistribution layers with hitherto unattained physical dimensions required for advanced 2.5D and 3D chip integration can be generated with high productivity employing short wavelength excimer laser systems.
Debris-free laser pre-treatment of carbon fiber composite surfaces as well as other novel material classes such as textiles were covered by presentations of Dr. Thomas Lukasczyk from Fraunhofer IFAM in Bremen and by Jahr Turchan from MTIX in Huddersfield, UK.
As a viable method to grow layers of complex materials for many applications, pulsed laser deposition (PLD with excimer lasers) has become ubiquitous. PLD system solutions for highest quality functional film growth in applied research environments were presented by Dr. Cas Damen from TSST in Enschede, NL.
In addition, Dr. James Greer from PVD Products in Wilmington, MA, USA gave an overview of the transfer of the PLD technology to production floor processes including required laser and machine concepts for upscaling and at the same time optimizing material transfer.
This year’s workshop was followed by a factory tour through the recently expanded cleanroom production premises for large line beam systems assembly and testing.
„Our Symposium has developed into a platform driving the exchange of ideas between laser users and manufacturers in the area of selective surface processing as noticeable by the rising number of international attendees“, Dr. Ralph Delmdahl from Coherent und Dr. Thomas Fahlbusch from PhotonicNet summarized satisfied with the event.